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Stress Birefringence Detection Equipment in Semiconductor Industry
Applications
| UV-ultraviolet | Semiconductor |
| Light source raw material manufacturer |
Working Principle
The birefringence of the substance is evaluated by comparing the light polarization states before and after the light
penetrates the object, and the magnitude of stress birefringence of the sample is determined after calculation.
Features
| Model | SBD-S-X—X |
| Working mode | Real-time measurement |
| Function | Stress magnitude, stress distribution |
| Detection wave band | VIS-520nm, 590nm, 650nm |
| Test range | 1~110nm & 1~280nm |
| Spatial resolution | 0.05mm |
| Test repeatability | 0.1nm |
| Measurement frequency | >15FPS |
| Note: Customized production available. | |
Detection Images
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